Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6777137 | EUVL mask structure and method of formation | Louis M. Kindt, James P. Levin, Michael R. Schmidt, Carey T. Williams | 2004-08-17 |
| 6699400 | Etch process and apparatus therefor | Arne Ballantine, Scott A. Estes, Gary L. Milo, Ronald A. Warren | 2004-03-02 |
| 6683306 | Array foreshortening measurement using a critical dimension scanning electron microscope | Reginald R. Bowley, Jr., Debra L. Meunier | 2004-01-27 |