Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825075 | Method of fabricating MIM capacitor with the encapsulated metal structure serving as the lower plate | Kevin S. Petrarca, Mahadevaiyer Krishnan, Kenneth J. Stein, Richard P. Volant | 2004-11-30 |
| 6812193 | Slurry for mechanical polishing (CMP) of metals and use thereof | Michael T. Brigham, Michael A. Cobb, William J. Cote, Kenneth M. Davis, Scott A. Estes +9 more | 2004-11-02 |
| 6762667 | Micro electromechanical switch having self-aligned spacers | Richard P. Volant, David Angell, Joseph T. Kocis, Kevin S. Petrarca, Kenneth J. Stein +1 more | 2004-07-13 |
| 6756624 | Encapsulated metal structures for semiconductor devices and MIM capacitors including the same | Kevin S. Petrarca, Mahadevaiyer Krishnan, Kenneth J. Stein, Richard P. Volant | 2004-06-29 |