Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831364 | Method for forming a porous dielectric material layer in a semiconductor device and device formed | Timothy J. Dalton, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman, Kenneth P. Rodbell +1 more | 2004-12-14 |
| 6784105 | Simultaneous native oxide removal and metal neutral deposition method | Chih-Chao Yang, Yun-Yu Wang, Larry Clevenger, Andrew H. Simon, Kaushik Chanda +3 more | 2004-08-31 |
| 6734096 | Fine-pitch device lithography using a sacrificial hardmask | Timothy J. Dalton, Minakshisundaran Balasubramanian Anand, Michael D. Armacost, Shyng-Tsong Chen, Stephen M. Gates +2 more | 2004-05-11 |
| 6727589 | Dual damascene flowable oxide insulation structure and metallic barrier | John P. Hummel, Joyce C. Liu, Vincent J. McGahay, Rebecca D. Mih, Kamalesh K. Srivastava | 2004-04-27 |