Issued Patents 2004
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831366 | Interconnects containing first and second porous low-k dielectrics separated by a porous buried etch stop layer | Stephen M. Gates, Satyanarayana V. Nitta, Sampath Purushothaman, Cristy Sensenich Tyberg | 2004-12-14 |
| 6831364 | Method for forming a porous dielectric material layer in a semiconductor device and device formed | Timothy J. Dalton, Stephen E. Greco, Satyanarayana V. Nitta, Sampath Purushothaman, Kenneth P. Rodbell +1 more | 2004-12-14 |
| 6818285 | Composition and method to achieve reduced thermal expansion in polyarylene networks | Muthumanickam Sankarapandian, Christy S. Tyberg, James P. Godschalx, Qingshan Jason Niu, Harry Craig Silvis | 2004-11-16 |
| 6815329 | Multilayer interconnect structure containing air gaps and method for making | Katherina Babich, Roy A. Carruthers, Timothy J. Dalton, Alfred Grill, Christopher V. Jahnes +4 more | 2004-11-09 |
| 6803660 | Patterning layers comprised of spin-on ceramic films | Stephen M. Gates, Elbert E. Huang, Dirk Pfeiffer | 2004-10-12 |
| 6783862 | Toughness, adhesion and smooth metal lines of porous low k dielectric interconnect structures | Kang-Wook Lee, Kelly Malone, Christy S. Tyberg | 2004-08-31 |
| 6737725 | Multilevel interconnect structure containing air gaps and method for making | Alfred Grill, Christopher V. Jahnes, Satyanarayana V. Nitta, Kevin S. Petrarca, Sampath Purushothaman +2 more | 2004-05-18 |
| 6730618 | Low k dielectric materials with inherent copper ion migration barrier | Stephan A. Cohen, Claudius Feger, Jane M. Shaw | 2004-05-04 |
| 6724069 | Spin-on cap layer, and semiconductor device containing same | Timothy J. Dalton, Stephen M. Gates, Satyanarayana V. Nitta, Sampath Purushothaman, Christy S. Tyberg | 2004-04-20 |
| 6716742 | Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics | Stephen M. Gates, Satyanarayana V. Nitta, Sampath Purushothaman, Cristy Sensenich Tyberg | 2004-04-06 |
| 6710450 | Interconnect structure with precise conductor resistance and method to form same | Stephen M. Gates, Satyanarayana V. Nitta, Sampath Purushothaman, Cristy Sensenich Tyberg | 2004-03-23 |
| 6677680 | Hybrid low-k interconnect structure comprised of 2 spin-on dielectric materials | Stephen M. Gates, Satyanarayana V. Nitta, Sampath Purushothaman, Cristy Sensenich Tyberg | 2004-01-13 |