Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806026 | Photoresist composition | Robert David Allen, Gregory Breyta, Phillip Brock, Richard Anthony DiPietro, Debra Fenzel-Alexander +5 more | 2004-10-19 |
| 6803660 | Patterning layers comprised of spin-on ceramic films | Stephen M. Gates, Jeffrey Hedrick, Elbert E. Huang | 2004-10-12 |
| 6780736 | Method for image reversal of implant resist using a single photolithography exposure and structures formed thereby | Steven J. Holmes, Toshiharu Furukawa, Arpan Mahorowala | 2004-08-24 |
| 6730454 | Antireflective SiO-containing compositions for hardmask layer | Marie Angelopoulos, Katherina Babich, Phillip Brock, Wu-Song Huang, Arpan Mahorowala +2 more | 2004-05-04 |