Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821718 | Radiation sensitive silicon-containing negative resists and use thereof | Marie Angelopoulos, Ari Aviram, Ranee W. Kwong, Robert N. Lang, Qinghuang Lin +1 more | 2004-11-23 |
| 6730454 | Antireflective SiO-containing compositions for hardmask layer | Dirk Pfeiffer, Marie Angelopoulos, Katherina Babich, Phillip Brock, Arpan Mahorowala +2 more | 2004-05-04 |
| 6689540 | Polymers and use thereof | Ari Aviram, C. Richard Guarnieri, Ranee W. Kwong, David R. Medeiros | 2004-02-10 |