Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780736 | Method for image reversal of implant resist using a single photolithography exposure and structures formed thereby | Steven J. Holmes, Toshiharu Furukawa, Dirk Pfeiffer | 2004-08-24 |
| 6730445 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, S. Jay Chey, Michael S. Hibbs, Robert N. Lang +1 more | 2004-05-04 |
| 6730454 | Antireflective SiO-containing compositions for hardmask layer | Dirk Pfeiffer, Marie Angelopoulos, Katherina Babich, Phillip Brock, Wu-Song Huang +2 more | 2004-05-04 |
| 6682860 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, S. Jay Chey, Michael S. Hibbs, Robert N. Lang +1 more | 2004-01-27 |