Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834548 | Method and apparatus for reduction of high-frequency vibrations in thick pellicles | — | 2004-12-28 |
| 6835502 | In-situ pellicle monitor | — | 2004-12-28 |
| 6824932 | Self-aligned alternating phase shift mask patterning process | Scott Bukofsky, Carlos A. Fonseca, Lars Liebmann | 2004-11-30 |
| 6730445 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, S. Jay Chey, Robert N. Lang, Arpan Mahorowala +1 more | 2004-05-04 |
| 6731378 | Pellicle distortion reduction | — | 2004-05-04 |
| 6682860 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, S. Jay Chey, Robert N. Lang, Arpan Mahorowala +1 more | 2004-01-27 |