Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815329 | Multilayer interconnect structure containing air gaps and method for making | Roy A. Carruthers, Timothy J. Dalton, Alfred Grill, Jeffrey Hedrick, Christopher V. Jahnes +4 more | 2004-11-09 |
| 6759321 | Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation | Alessandro C. Callegari, Stephen A. Cohen, Alfred Grill, Christopher V. Jahnes, Vishnubhai V. Patel +2 more | 2004-07-06 |
| 6730445 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, S. Jay Chey, Michael S. Hibbs, Robert N. Lang, Arpan Mahorowala +1 more | 2004-05-04 |
| 6730454 | Antireflective SiO-containing compositions for hardmask layer | Dirk Pfeiffer, Marie Angelopoulos, Phillip Brock, Wu-Song Huang, Arpan Mahorowala +2 more | 2004-05-04 |
| 6686124 | Multifunctional polymeric materials and use thereof | Marie Angelopoulos, David R. Medeiros, Wayne M. Moreau | 2004-02-03 |
| 6682860 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, S. Jay Chey, Michael S. Hibbs, Robert N. Lang, Arpan Mahorowala +1 more | 2004-01-27 |