Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818381 | Underlayer compositions for multilayer lithographic processes | Mahmoud Khojasteh, Timothy Hughes, Ranee W. Kwong, Pushkara R. Varanasi, William R. Brunsvold +4 more | 2004-11-16 |
| 6806026 | Photoresist composition | Robert David Allen, Gregory Breyta, Phillip Brock, Richard Anthony DiPietro, Debra Fenzel-Alexander +5 more | 2004-10-19 |
| 6730454 | Antireflective SiO-containing compositions for hardmask layer | Dirk Pfeiffer, Marie Angelopoulos, Katherina Babich, Phillip Brock, Wu-Song Huang +2 more | 2004-05-04 |
| 6689540 | Polymers and use thereof | Ari Aviram, C. Richard Guarnieri, Wu-Song Huang, Ranee W. Kwong | 2004-02-10 |
| 6686124 | Multifunctional polymeric materials and use thereof | Marie Angelopoulos, Katherina Babich, Wayne M. Moreau | 2004-02-03 |
| 6673521 | Supercritical fluid(SCF) silylation process | Wayne M. Moreau, Kenneth McCullough, John P. Simons, Charles J. Taft | 2004-01-06 |