Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818381 | Underlayer compositions for multilayer lithographic processes | Mahmoud Khojasteh, Timothy Hughes, Ranee W. Kwong, William R. Brunsvold, Margaret C. Lawson +4 more | 2004-11-16 |
| 6770418 | Positive resist compositions containing non-polymeric silicon | Wenjie Li, Ranee W. Kwong | 2004-08-03 |
| 6770419 | Low silicon-outgassing resist for bilayer lithography | Mahmoud Khojasteh, Ranee W. Kwong, Kuang-Jung Chen, Robert David Allen, Phillip Brock +2 more | 2004-08-03 |
| 6756180 | Cyclic olefin-based resist compositions having improved image stability | Wenjie Li, Masafumi Yamamoto | 2004-06-29 |
| 6696216 | Thiophene-containing photo acid generators for photolithography | Wenjie Li, Kuang-Jung Chen | 2004-02-24 |