Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821718 | Radiation sensitive silicon-containing negative resists and use thereof | Marie Angelopoulos, Ari Aviram, Wu-Song Huang, Robert N. Lang, Qinghuang Lin +1 more | 2004-11-23 |
| 6818381 | Underlayer compositions for multilayer lithographic processes | Mahmoud Khojasteh, Timothy Hughes, Pushkara R. Varanasi, William R. Brunsvold, Margaret C. Lawson +4 more | 2004-11-16 |
| 6770418 | Positive resist compositions containing non-polymeric silicon | Wenjie Li, Pushkara R. Varanasi | 2004-08-03 |
| 6770419 | Low silicon-outgassing resist for bilayer lithography | Mahmoud Khojasteh, Kuang-Jung Chen, Pushkara R. Varanasi, Robert David Allen, Phillip Brock +2 more | 2004-08-03 |
| 6689540 | Polymers and use thereof | Ari Aviram, C. Richard Guarnieri, Wu-Song Huang, David R. Medeiros | 2004-02-10 |