Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818381 | Underlayer compositions for multilayer lithographic processes | Timothy Hughes, Ranee W. Kwong, Pushkara R. Varanasi, William R. Brunsvold, Margaret C. Lawson +4 more | 2004-11-16 |
| 6770419 | Low silicon-outgassing resist for bilayer lithography | Ranee W. Kwong, Kuang-Jung Chen, Pushkara R. Varanasi, Robert David Allen, Phillip Brock +2 more | 2004-08-03 |