Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818381 | Underlayer compositions for multilayer lithographic processes | Mahmoud Khojasteh, Timothy Hughes, Ranee W. Kwong, Pushkara R. Varanasi, William R. Brunsvold +4 more | 2004-11-16 |
| 6806026 | Photoresist composition | Gregory Breyta, Phillip Brock, Richard Anthony DiPietro, Debra Fenzel-Alexander, Carl E. Larson +5 more | 2004-10-19 |
| 6794459 | Modified polycyclic polymers | Saikumar Jayaraman, George M. Benedikt, Larry F. Rhodes, Richard Vicari, Richard Anthony DiPietro +2 more | 2004-09-21 |
| 6770419 | Low silicon-outgassing resist for bilayer lithography | Mahmoud Khojasteh, Ranee W. Kwong, Kuang-Jung Chen, Pushkara R. Varanasi, Phillip Brock +2 more | 2004-08-03 |
| 6723486 | Photoresist compositions comprising polycyclic polymers with acid labile pendant groups | Brian L. Goodall, Saikumar Jayaraman, Robert A. Shick, Larry F. Rhodes, Richard Anthony DiPietro +1 more | 2004-04-20 |