Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730445 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, Michael S. Hibbs, Robert N. Lang, Arpan Mahorowala +1 more | 2004-05-04 |
| 6682860 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, Michael S. Hibbs, Robert N. Lang, Arpan Mahorowala +1 more | 2004-01-27 |