Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829056 | Monitoring dimensions of features at different locations in the processing of substrates | Michael Barnes, John D. Holland, II, Hongqing Shan, Bryan Pu, Mohit Jain +5 more | 2004-12-07 |
| 6780753 | Airgap for semiconductor devices | Ian Latchford, Christopher Dennis Bencher, Timothy Weidman, Christopher S. Ngai | 2004-08-24 |
| 6750113 | Metal-insulator-metal capacitor in copper | Andreas Augustin, Gerald Friese, John E. Heidenreich, III, Gary Robert Hueckel, Kenneth J. Stein | 2004-06-15 |
| 6734096 | Fine-pitch device lithography using a sacrificial hardmask | Timothy J. Dalton, Minakshisundaran Balasubramanian Anand, Shyng-Tsong Chen, Stephen M. Gates, Stephen E. Greco +2 more | 2004-05-11 |