Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734096 | Fine-pitch device lithography using a sacrificial hardmask | Timothy J. Dalton, Michael D. Armacost, Shyng-Tsong Chen, Stephen M. Gates, Stephen E. Greco +2 more | 2004-05-11 |
| 6720658 | Semiconductor device having a plurality of conductive layers | — | 2004-04-13 |