Issued Patents 2004
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828259 | Enhanced transistor gate using E-beam radiation | Chih-Yuh Yang, Marina V. Plat, Russell R.A. Callahan, Ashok M. Khathuria | 2004-12-07 |
| 6825114 | Selective stress-inducing implant and resulting pattern distortion in amorphous carbon patterning | Christopher F. Lyons, Srikanteswara Dakshina-Murthy | 2004-11-30 |
| 6784073 | Method of making semiconductor-on-insulator device with thermoelectric cooler | — | 2004-08-31 |
| 6773998 | Modified film stack and patterning strategy for stress compensation and prevention of pattern distortion in amorphous carbon gate patterning | Marina V. Plat, Chih-Yuh Yang, Christopher F. Lyons, Scott A. Bell, Douglas J. Bonser +2 more | 2004-08-10 |
| 6764947 | Method for reducing gate line deformation and reducing gate line widths in semiconductor devices | Darin A. Chan, Douglas J. Bonser, Marina V. Plat, Marilyn I. Wright, Chih-Yuh Yang +2 more | 2004-07-20 |
| 6764949 | Method for reducing pattern deformation and photoresist poisoning in semiconductor device fabrication | Douglas J. Bonser, Marina V. Plat, Chih-Yuh Yang, Scott A. Bell, Darin A. Chan +6 more | 2004-07-20 |
| 6756255 | CMOS process with an integrated, high performance, silicide agglomeration fuse | Ciby Thuruthiyil | 2004-06-29 |
| 6747333 | Method and apparatus for STI using passivation material for trench bottom liner | Qi Xiang | 2004-06-08 |
| 6723666 | Method for reducing gate oxide surface irregularities | William G. En | 2004-04-20 |
| 6674128 | Semiconductor-on-insulator device with thermoelectric cooler on surface | — | 2004-01-06 |
| 6673684 | Use of diamond as a hard mask material | Richard J. Huang, Cyrus E. Tabery | 2004-01-06 |