Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6804014 | Method and apparatus for determining contact opening dimensions using scatterometry | Richard J. Markle, Kevin R. Lensing, J. Broc Stirton | 2004-10-12 |
| 6774998 | Method and apparatus for identifying misregistration in a complimentary phase shift mask process | Kevin R. Lensing, James Broc Stirton | 2004-08-10 |
| 6773939 | Method and apparatus for determining critical dimension variation in a line structure | — | 2004-08-10 |
| 6766215 | Method and apparatus for detecting necking over field/active transitions | Kevin R. Lensing | 2004-07-20 |
| 6764947 | Method for reducing gate line deformation and reducing gate line widths in semiconductor devices | Darin A. Chan, Douglas J. Bonser, Marina V. Plat, Chih-Yuh Yang, Lu You +2 more | 2004-07-20 |
| 6764949 | Method for reducing pattern deformation and photoresist poisoning in semiconductor device fabrication | Douglas J. Bonser, Marina V. Plat, Chih-Yuh Yang, Scott A. Bell, Darin A. Chan +6 more | 2004-07-20 |
| 6716646 | Method and apparatus for performing overlay measurements using scatterometry | Kevin R. Lensing, James Broc Stirton, Richard J. Markle | 2004-04-06 |
| 6697153 | Method and apparatus for analyzing line structures | James Broc Stirton | 2004-02-24 |