Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815235 | Methods of controlling formation of metal silicide regions, and system for performing same | — | 2004-11-09 |
| 6804014 | Method and apparatus for determining contact opening dimensions using scatterometry | Kevin R. Lensing, J. Broc Stirton, Marilyn I. Wright | 2004-10-12 |
| 6794299 | Various methods of controlling conformal film deposition processes, and a system for accomplishing same | David W. Bennett | 2004-09-21 |
| 6790683 | Methods of controlling wet chemical processes in forming metal silicide regions, and system for performing same | Terri A. Couteau | 2004-09-14 |
| 6790376 | Process control based upon weight or mass measurements, and systems for accomplishing same | Robert J. Chong | 2004-09-14 |
| 6716646 | Method and apparatus for performing overlay measurements using scatterometry | Marilyn I. Wright, Kevin R. Lensing, James Broc Stirton | 2004-04-06 |
| 6701206 | Method and system for controlling a process tool | Lance Nevala | 2004-03-02 |
| 6677170 | Method for determining process layer thickness using scatterometry measurements | — | 2004-01-13 |