Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6804619 | Process control based on tool health data | Eric O. Green, Jin Wang | 2004-10-12 |
| 6790376 | Process control based upon weight or mass measurements, and systems for accomplishing same | Richard J. Markle | 2004-09-14 |