Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834213 | Process control based upon a metrology delay | Thomas J. Sonderman, Naomi M. Jenkins, Elfido Coss, Jr. | 2004-12-21 |
| 6804619 | Process control based on tool health data | Robert J. Chong, Eric O. Green | 2004-10-12 |
| 6778873 | Identifying a cause of a fault based on a process controller output | Elfido Coss, Jr., Brian K. Cusson, Alexander J. Pasadyn, Michael L. Miller, Naomi M. Jenkins +1 more | 2004-08-17 |
| 6773931 | Dynamic targeting for a process control system | Alexander J. Pasadyn, Thomas J. Sonderman | 2004-08-10 |
| 6766214 | Adjusting a sampling rate based on state estimation results | Brian K. Cusson | 2004-07-20 |