Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831555 | Method and apparatus for dynamically monitoring system components in an advanced process control (APC) framework | Elfido Coss, Jr. | 2004-12-14 |
| 6801817 | Method and apparatus for integrating multiple process controllers | Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2004-10-05 |
| 6785586 | Method and apparatus for adaptively scheduling tool maintenance | Anthony J. Toprac, Thomas J. Sonderman, Christopher A. Bode, Alexander J. Pasadyn, Joyce S. Oey Hewett +1 more | 2004-08-31 |
| 6778873 | Identifying a cause of a fault based on a process controller output | Jin Wang, Elfido Coss, Jr., Brian K. Cusson, Alexander J. Pasadyn, Naomi M. Jenkins +1 more | 2004-08-17 |
| 6706541 | Method and apparatus for controlling wafer uniformity using spatially resolved sensors | Anthony J. Toprac | 2004-03-16 |
| 6699727 | Method for prioritizing production lots based on grade estimates and output requirements | Anthony J. Toprac, Joyce S. Oey Hewett, Christopher A. Bode, Alexander J. Pasadyn, Anastasia Oshelski Peterson +1 more | 2004-03-02 |
| 6697691 | Method and apparatus for fault model analysis in manufacturing tools | Terrence J. Riley, Qingsu Wang | 2004-02-24 |
| 6675058 | Method and apparatus for controlling the flow of wafers through a process flow | Alexander J. Pasadyn, Anthony J. Toprac, Christopher A. Bode, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2004-01-06 |