Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6738731 | Method and apparatus for using tool state information to identify faulty wafers | Terrence J. Riley, Glen W. Scheid, Kent Knox | 2004-05-18 |
| 6725402 | Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework | Elfido Coss, Jr., Terrence J. Riley | 2004-04-20 |
| 6697691 | Method and apparatus for fault model analysis in manufacturing tools | Michael L. Miller, Terrence J. Riley | 2004-02-24 |