Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819963 | Run-to-run control method for proportional-integral-derivative (PID) controller tuning for rapid thermal processing (RTP) | William J. Campbell | 2004-11-16 |
| 6738731 | Method and apparatus for using tool state information to identify faulty wafers | Qingsu Wang, Glen W. Scheid, Kent Knox | 2004-05-18 |
| 6725402 | Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework | Elfido Coss, Jr., Qingsu Wang | 2004-04-20 |
| 6697691 | Method and apparatus for fault model analysis in manufacturing tools | Michael L. Miller, Qingsu Wang | 2004-02-24 |