Issued Patents 2004
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834213 | Process control based upon a metrology delay | Thomas J. Sonderman, Jin Wang, Naomi M. Jenkins | 2004-12-21 |
| 6834211 | Adjusting a trace data rate based upon a tool state | Brian K. Cusson | 2004-12-21 |
| 6831555 | Method and apparatus for dynamically monitoring system components in an advanced process control (APC) framework | Michael L. Miller | 2004-12-14 |
| 6790680 | Determining a possible cause of a fault in a semiconductor fabrication process | Jason Grover, Michael R. Conboy, Sam Allen | 2004-09-14 |
| 6792389 | Method of dynamically enabling additional sensors based upon initial sensor data, and system for accomplishing same | Sam Allen, Michael R. Conboy | 2004-09-14 |
| 6778873 | Identifying a cause of a fault based on a process controller output | Jin Wang, Brian K. Cusson, Alexander J. Pasadyn, Michael L. Miller, Naomi M. Jenkins +1 more | 2004-08-17 |
| 6778876 | Methods of processing substrates based upon substrate orientation | Howard E. Castle | 2004-08-17 |
| 6763278 | Operating a processing tool in a degraded mode upon detecting a fault | Michael R. Conboy, Sam Allen | 2004-07-13 |
| 6740534 | Determination of a process flow based upon fault detection analysis | Ernest D. Adams, III, Matthew A. Purdy, Gregory A. Cherry, Eric O. Green, Brian K. Cusson +2 more | 2004-05-25 |
| 6725402 | Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework | Qingsu Wang, Terrence J. Riley | 2004-04-20 |
| 6711450 | Integration of business rule parameters in priority setting of wafer processing | Michael R. Conboy, Jason Grover | 2004-03-23 |
| 6699004 | Wafer rotation in wafer handling devices | Michael R. Conboy, Russel Shirley | 2004-03-02 |
| 6697696 | Fault detection control system using dual bus architecture, and methods of using same | Susan Hickey | 2004-02-24 |