Issued Patents 2004
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6823231 | Tuning of a process control based upon layer dependencies | Christopher A. Bode | 2004-11-23 |
| 6821792 | Method and apparatus for determining a sampling plan based on process and equipment state information | Thomas J. Sonderman, Christopher A. Bode | 2004-11-23 |
| 6801817 | Method and apparatus for integrating multiple process controllers | Christopher A. Bode, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2004-10-05 |
| 6788988 | Method and apparatus using integrated metrology data for pre-process and post-process control | Christopher A. Bode | 2004-09-07 |
| 6785586 | Method and apparatus for adaptively scheduling tool maintenance | Anthony J. Toprac, Thomas J. Sonderman, Christopher A. Bode, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2004-08-31 |
| 6778873 | Identifying a cause of a fault based on a process controller output | Jin Wang, Elfido Coss, Jr., Brian K. Cusson, Michael L. Miller, Naomi M. Jenkins +1 more | 2004-08-17 |
| 6773931 | Dynamic targeting for a process control system | Thomas J. Sonderman, Jin Wang | 2004-08-10 |
| 6764868 | Use of slurry waste composition to determine the amount of metal removed during chemical mechanical polishing, and system for accomplishing same | Joyce S. Oey Hewett | 2004-07-20 |
| 6756243 | Method and apparatus for cascade control using integrated metrology | Christopher A. Bode | 2004-06-29 |
| 6757579 | Kalman filter state estimation for a manufacturing system | — | 2004-06-29 |
| 6751518 | Dynamic process state adjustment of a processing tool to reduce non-uniformity | Thomas J. Sonderman, Christopher A. Bode | 2004-06-15 |
| 6746308 | Dynamic lot allocation based upon wafer state characteristics, and system for accomplishing same | Christopher A. Bode | 2004-06-08 |
| 6745086 | Method and apparatus for determining control actions incorporating defectivity effects | Thomas J. Sonderman, Christopher A. Bode | 2004-06-01 |
| 6738682 | Method and apparatus for scheduling based on state estimation uncertainties | — | 2004-05-18 |
| 6737208 | Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay information | Christopher A. Bode | 2004-05-18 |
| 6732007 | Method and apparatus for implementing dynamic qualification recipes | Christopher A. Bode | 2004-05-04 |
| 6725121 | Method and apparatus for using a dynamic control model to compensate for a process interrupt | Anthony J. Toprac | 2004-04-20 |
| 6708075 | Method and apparatus for utilizing integrated metrology data as feed-forward data | Thomas J. Sonderman, Christopher A. Bode | 2004-03-16 |
| 6708129 | Method and apparatus for wafer-to-wafer control with partial measurement data | Matthew A. Purdy | 2004-03-16 |
| 6699727 | Method for prioritizing production lots based on grade estimates and output requirements | Anthony J. Toprac, Joyce S. Oey Hewett, Christopher A. Bode, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2004-03-02 |
| 6698009 | Method and apparatus for modeling of batch dynamics based upon integrated metrology | Christopher A. Bode | 2004-02-24 |
| 6687561 | Method and apparatus for determining a sampling plan based on defectivity | Christopher A. Bode | 2004-02-03 |
| 6678570 | Method and apparatus for determining output characteristics using tool state data | Thomas J. Sonderman | 2004-01-13 |
| 6675058 | Method and apparatus for controlling the flow of wafers through a process flow | Anthony J. Toprac, Christopher A. Bode, Joyce S. Oey Hewett, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2004-01-06 |