Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6785586 | Method and apparatus for adaptively scheduling tool maintenance | Anthony J. Toprac, Thomas J. Sonderman, Christopher A. Bode, Alexander J. Pasadyn, Anastasia Oshelski Peterson +1 more | 2004-08-31 |
| 6764868 | Use of slurry waste composition to determine the amount of metal removed during chemical mechanical polishing, and system for accomplishing same | Alexander J. Pasadyn | 2004-07-20 |
| 6675058 | Method and apparatus for controlling the flow of wafers through a process flow | Alexander J. Pasadyn, Anthony J. Toprac, Christopher A. Bode, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2004-01-06 |