Issued Patents 2004
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834213 | Process control based upon a metrology delay | Jin Wang, Naomi M. Jenkins, Elfido Coss, Jr. | 2004-12-21 |
| 6821792 | Method and apparatus for determining a sampling plan based on process and equipment state information | Alexander J. Pasadyn, Christopher A. Bode | 2004-11-23 |
| 6818561 | Control methodology using optical emission spectroscopy derived data, system for performing same | — | 2004-11-16 |
| 6800562 | Method of controlling wafer charging effects due to manufacturing processes | Brian K. Cusson | 2004-10-05 |
| 6802045 | Method and apparatus for incorporating control simulation environment | Anthony J. Toprac, Anastasia Oshelski Peterson | 2004-10-05 |
| 6801817 | Method and apparatus for integrating multiple process controllers | Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2004-10-05 |
| 6785586 | Method and apparatus for adaptively scheduling tool maintenance | Anthony J. Toprac, Christopher A. Bode, Alexander J. Pasadyn, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2004-08-31 |
| 6773931 | Dynamic targeting for a process control system | Alexander J. Pasadyn, Jin Wang | 2004-08-10 |
| 6751518 | Dynamic process state adjustment of a processing tool to reduce non-uniformity | Alexander J. Pasadyn, Christopher A. Bode | 2004-06-15 |
| 6745086 | Method and apparatus for determining control actions incorporating defectivity effects | Alexander J. Pasadyn, Christopher A. Bode | 2004-06-01 |
| 6708075 | Method and apparatus for utilizing integrated metrology data as feed-forward data | Alexander J. Pasadyn, Christopher A. Bode | 2004-03-16 |
| 6699727 | Method for prioritizing production lots based on grade estimates and output requirements | Anthony J. Toprac, Joyce S. Oey Hewett, Christopher A. Bode, Alexander J. Pasadyn, Anastasia Oshelski Peterson +1 more | 2004-03-02 |
| 6678570 | Method and apparatus for determining output characteristics using tool state data | Alexander J. Pasadyn | 2004-01-13 |
| 6675058 | Method and apparatus for controlling the flow of wafers through a process flow | Alexander J. Pasadyn, Anthony J. Toprac, Christopher A. Bode, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2004-01-06 |