Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6801817 | Method and apparatus for integrating multiple process controllers | Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2004-10-05 |
| 6784001 | Automated variation of stepper exposure dose based upon across wafer variations in device characteristics, and system for accomplishing same | Anthony J. Toprac | 2004-08-31 |
| 6746958 | Method of controlling the duration of an endpoint polishing process in a multistage polishing process | Gerd Marxsen, Anthony J. Toprac | 2004-06-08 |
| 6699727 | Method for prioritizing production lots based on grade estimates and output requirements | Anthony J. Toprac, Christopher A. Bode, Alexander J. Pasadyn, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2004-03-02 |