Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6774030 | Method and system for improving the manufacturing of metal damascene structures | Axel Preusse | 2004-08-10 |
| 6761812 | Apparatus and method for electrochemical metal deposition | Axel Preusse | 2004-07-13 |
| 6752697 | Apparatus and method for chemical mechanical polishing of a substrate | Uwe Stoeckgen | 2004-06-22 |
| 6746958 | Method of controlling the duration of an endpoint polishing process in a multistage polishing process | Joyce S. Oey Hewett, Anthony J. Toprac | 2004-06-08 |
| 6720264 | Prevention of precipitation defects on copper interconnects during CMP by use of solutions containing organic compounds with silica adsorption and copper corrosion inhibiting properties | Kashmir Sahota, Diana M. Schonauer, Johannes Groschopf, Steven C. Avanzino | 2004-04-13 |
| 6699107 | Polishing head and apparatus with an improved pad conditioner for chemical mechanical polishing | Uwe Stoeckgen | 2004-03-02 |