Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6752697 | Apparatus and method for chemical mechanical polishing of a substrate | Gerd Marxsen | 2004-06-22 |
| 6699107 | Polishing head and apparatus with an improved pad conditioner for chemical mechanical polishing | Gerd Marxsen | 2004-03-02 |