Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790686 | Method and apparatus for integrating dispatch and process control actions | Cabe W. Nicksic | 2004-09-14 |
| 6790752 | Methods of controlling VSS implants on memory devices, and system for performing same | — | 2004-09-14 |
| 6740534 | Determination of a process flow based upon fault detection analysis | Ernest D. Adams, III, Gregory A. Cherry, Eric O. Green, Elfido Coss, Jr., Brian K. Cusson +2 more | 2004-05-25 |
| 6734088 | Control of two-step gate etch process | Scott Bushman, James H. Hussey, Jr., Douglas J. Bonser | 2004-05-11 |
| 6728591 | Method and apparatus for run-to-run control of trench profiles | James H. Hussey, Jr. | 2004-04-27 |
| 6708129 | Method and apparatus for wafer-to-wafer control with partial measurement data | Alexander J. Pasadyn | 2004-03-16 |