Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734088 | Control of two-step gate etch process | Matthew A. Purdy, Scott Bushman, Douglas J. Bonser | 2004-05-11 |
| 6728591 | Method and apparatus for run-to-run control of trench profiles | Matthew A. Purdy | 2004-04-27 |