Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6804014 | Method and apparatus for determining contact opening dimensions using scatterometry | Richard J. Markle, J. Broc Stirton, Marilyn I. Wright | 2004-10-12 |
| 6785009 | Method of using high yielding spectra scatterometry measurements to control semiconductor manufacturing processes, and systems for accomplishing same | James Broc Stirton, Hormuzdiar E. Nariman, Steven P. Reeves | 2004-08-31 |
| 6774998 | Method and apparatus for identifying misregistration in a complimentary phase shift mask process | Marilyn I. Wright, James Broc Stirton | 2004-08-10 |
| 6766215 | Method and apparatus for detecting necking over field/active transitions | Marilyn I. Wright | 2004-07-20 |
| 6746882 | Method of correcting non-linearity of metrology tools, and system for performing same | James Broc Stirton | 2004-06-08 |
| 6716646 | Method and apparatus for performing overlay measurements using scatterometry | Marilyn I. Wright, James Broc Stirton, Richard J. Markle | 2004-04-06 |
| 6707562 | Method of using scatterometry measurements to control photoresist etch process | — | 2004-03-16 |