Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822260 | Linewidth measurement structure with embedded scatterometry structure | Derick J. Wristers | 2004-11-23 |
| 6812506 | Polysilicon linewidth measurement structure with embedded transistor | Derick J. Wristers | 2004-11-02 |
| 6801096 | Ring oscillator with embedded scatterometry grate array | Derick J. Wristers, James F. Buller | 2004-10-05 |
| 6785009 | Method of using high yielding spectra scatterometry measurements to control semiconductor manufacturing processes, and systems for accomplishing same | James Broc Stirton, Kevin R. Lensing, Steven P. Reeves | 2004-08-31 |