Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6836691 | Method and apparatus for filtering metrology data based on collection purpose | — | 2004-12-28 |
| 6808946 | Method of using critical dimension measurements to control stepper process parameters | Richard D. Edwards, Christopher A. Bode | 2004-10-26 |
| 6790570 | Method of using scatterometry measurements to control stepper process parameters | Richard D. Edwards, Christopher A. Bode | 2004-09-14 |
| 6785009 | Method of using high yielding spectra scatterometry measurements to control semiconductor manufacturing processes, and systems for accomplishing same | Kevin R. Lensing, Hormuzdiar E. Nariman, Steven P. Reeves | 2004-08-31 |
| 6774998 | Method and apparatus for identifying misregistration in a complimentary phase shift mask process | Marilyn I. Wright, Kevin R. Lensing | 2004-08-10 |
| 6746882 | Method of correcting non-linearity of metrology tools, and system for performing same | Kevin R. Lensing | 2004-06-08 |
| 6716646 | Method and apparatus for performing overlay measurements using scatterometry | Marilyn I. Wright, Kevin R. Lensing, Richard J. Markle | 2004-04-06 |
| 6697153 | Method and apparatus for analyzing line structures | Marilyn I. Wright | 2004-02-24 |