Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815232 | Method and apparatus for overlay control using multiple targets | Gary Jones, Christopher A. Bode | 2004-11-09 |
| 6808946 | Method of using critical dimension measurements to control stepper process parameters | James Broc Stirton, Christopher A. Bode | 2004-10-26 |
| 6790570 | Method of using scatterometry measurements to control stepper process parameters | James Broc Stirton, Christopher A. Bode | 2004-09-14 |