Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6646235 | Multi-zone resistive heater | Henry Ho, Michael Yang, Bruce W. Peuse, Karl A. Littau, Yu-Chia Chang | 2003-11-11 |
| 6645884 | Method of forming a silicon nitride layer on a substrate | Michael Yang, Chien-Teh Kao, Karl A. Littau, Henry Ho, Ying Yu | 2003-11-11 |
| 6586343 | Method and apparatus for directing constituents through a processing chamber | Henry Ho, Ying Yu | 2003-07-01 |
| 6582522 | Emissivity-change-free pumping plate kit in a single wafer chamber | Lee Luo, Henry Ho, Shulin Wang, Binh Tran, Alexander Tam +2 more | 2003-06-24 |
| 6566183 | Method of making a transistor, in particular spacers of the transistor | Lee Luo, Kegang Huang, Tzy-Tzan Fu, Kuan-Ting Lin, Hung-Chuan Chen | 2003-05-20 |
| 6559074 | Method of forming a silicon nitride layer on a substrate | Xianzhi Tao, Shulin Wang, Lee Luo, Kegang Huang, Sang-Hoon Ahn | 2003-05-06 |
| 6559039 | Doped silicon deposition process in resistively heated single wafer chamber | Shulin Wang, Lee Luo, Errol Antonio C. Sanchez, Xianzhi Tao, Zoran Dragojlovic +1 more | 2003-05-06 |
| 6530992 | Method of forming a film in a chamber and positioning a substitute in a chamber | Michael Yang, Henry Ho | 2003-03-11 |