Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660126 | Lid assembly for a processing system to facilitate sequential deposition techniques | Anh N. Nguyen, Ming Xi, Hua Chung, Anzhong Chang, Xiaoxiong Yuan +1 more | 2003-12-09 |
| 6645884 | Method of forming a silicon nitride layer on a substrate | Chien-Teh Kao, Karl A. Littau, Steven Chen, Henry Ho, Ying Yu | 2003-11-11 |
| 6646235 | Multi-zone resistive heater | Steven Chen, Henry Ho, Bruce W. Peuse, Karl A. Littau, Yu-Chia Chang | 2003-11-11 |
| 6530992 | Method of forming a film in a chamber and positioning a substitute in a chamber | Henry Ho, Steven Chen | 2003-03-11 |