Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645884 | Method of forming a silicon nitride layer on a substrate | Michael Yang, Chien-Teh Kao, Karl A. Littau, Steven Chen, Henry Ho | 2003-11-11 |
| 6586343 | Method and apparatus for directing constituents through a processing chamber | Henry Ho, Steven Chen | 2003-07-01 |