Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652655 | Method to isolate multi zone heater from atmosphere | — | 2003-11-25 |
| 6645884 | Method of forming a silicon nitride layer on a substrate | Michael Yang, Chien-Teh Kao, Karl A. Littau, Steven Chen, Ying Yu | 2003-11-11 |
| 6646235 | Multi-zone resistive heater | Steven Chen, Michael Yang, Bruce W. Peuse, Karl A. Littau, Yu-Chia Chang | 2003-11-11 |
| 6617553 | Multi-zone resistive heater | Anqing Cui, Xiaoxiong Yuan | 2003-09-09 |
| 6586343 | Method and apparatus for directing constituents through a processing chamber | Ying Yu, Steven Chen | 2003-07-01 |
| 6582522 | Emissivity-change-free pumping plate kit in a single wafer chamber | Lee Luo, Shulin Wang, Binh Tran, Alexander Tam, Errol Antonio C. Sanchez +2 more | 2003-06-24 |
| 6530992 | Method of forming a film in a chamber and positioning a substitute in a chamber | Michael Yang, Steven Chen | 2003-03-11 |