Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645884 | Method of forming a silicon nitride layer on a substrate | Michael Yang, Karl A. Littau, Steven Chen, Henry Ho, Ying Yu | 2003-11-11 |
| 6603269 | Resonant chamber applicator for remote plasma source | Be Van Vo, Salvador P. Umotoy, Son Trinh, Lawrence Chung-Lai Lei, Sergio Edelstein +2 more | 2003-08-05 |