Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645884 | Method of forming a silicon nitride layer on a substrate | Michael Yang, Chien-Teh Kao, Steven Chen, Henry Ho, Ying Yu | 2003-11-11 |
| 6646235 | Multi-zone resistive heater | Steven Chen, Henry Ho, Michael Yang, Bruce W. Peuse, Yu-Chia Chang | 2003-11-11 |