Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6582522 | Emissivity-change-free pumping plate kit in a single wafer chamber | Henry Ho, Shulin Wang, Binh Tran, Alexander Tam, Errol Antonio C. Sanchez +2 more | 2003-06-24 |
| 6566183 | Method of making a transistor, in particular spacers of the transistor | Steven Chen, Kegang Huang, Tzy-Tzan Fu, Kuan-Ting Lin, Hung-Chuan Chen | 2003-05-20 |
| 6559039 | Doped silicon deposition process in resistively heated single wafer chamber | Shulin Wang, Steven Chen, Errol Antonio C. Sanchez, Xianzhi Tao, Zoran Dragojlovic +1 more | 2003-05-06 |
| 6559074 | Method of forming a silicon nitride layer on a substrate | Steven Chen, Xianzhi Tao, Shulin Wang, Kegang Huang, Sang-Hoon Ahn | 2003-05-06 |