Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6582522 | Emissivity-change-free pumping plate kit in a single wafer chamber | Lee Luo, Henry Ho, Shulin Wang, Binh Tran, Alexander Tam +2 more | 2003-06-24 |
| 6559039 | Doped silicon deposition process in resistively heated single wafer chamber | Shulin Wang, Lee Luo, Steven Chen, Errol Antonio C. Sanchez, Zoran Dragojlovic +1 more | 2003-05-06 |
| 6559074 | Method of forming a silicon nitride layer on a substrate | Steven Chen, Shulin Wang, Lee Luo, Kegang Huang, Sang-Hoon Ahn | 2003-05-06 |