Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6559074 | Method of forming a silicon nitride layer on a substrate | Steven Chen, Xianzhi Tao, Shulin Wang, Lee Luo, Kegang Huang | 2003-05-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6559074 | Method of forming a silicon nitride layer on a substrate | Steven Chen, Xianzhi Tao, Shulin Wang, Lee Luo, Kegang Huang | 2003-05-06 |