Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6582522 | Emissivity-change-free pumping plate kit in a single wafer chamber | Lee Luo, Henry Ho, Binh Tran, Alexander Tam, Errol Antonio C. Sanchez +2 more | 2003-06-24 |
| 6559039 | Doped silicon deposition process in resistively heated single wafer chamber | Lee Luo, Steven Chen, Errol Antonio C. Sanchez, Xianzhi Tao, Zoran Dragojlovic +1 more | 2003-05-06 |
| 6559074 | Method of forming a silicon nitride layer on a substrate | Steven Chen, Xianzhi Tao, Lee Luo, Kegang Huang, Sang-Hoon Ahn | 2003-05-06 |
| 6555183 | Plasma treatment of a titanium nitride film formed by chemical vapor deposition | Ming Xi, Zvi Lando, Mei Chang | 2003-04-29 |
| 6548402 | Method of depositing a thick titanium nitride film | Ming Xi, Frederick Wu, Ramanujapuram A. Srinivas, Yehuda Demayo, Zvi Lando +2 more | 2003-04-15 |
| 6524952 | Method of forming a titanium silicide layer on a substrate | Ramanujapuram A. Srinivas, Brian Metzger, Frederick Wu | 2003-02-25 |