Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555183 | Plasma treatment of a titanium nitride film formed by chemical vapor deposition | Shulin Wang, Ming Xi, Mei Chang | 2003-04-29 |
| 6548402 | Method of depositing a thick titanium nitride film | Shulin Wang, Ming Xi, Frederick Wu, Ramanujapuram A. Srinivas, Yehuda Demayo +2 more | 2003-04-15 |