Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573181 | Method of forming contact structures using nitrogen trifluoride preclean etch process and a titanium chemical vapor deposition step | Mohan K. Bhan, Jennifer Kopp | 2003-06-03 |
| 6548402 | Method of depositing a thick titanium nitride film | Shulin Wang, Ming Xi, Frederick Wu, Yehuda Demayo, Zvi Lando +2 more | 2003-04-15 |
| 6524952 | Method of forming a titanium silicide layer on a substrate | Brian Metzger, Shulin Wang, Frederick Wu | 2003-02-25 |